Depth-based 3D Semiconductor Reconstruction from SEM Image using OCD Spectrum
- 발행기관 서강대학교 일반대학원
- 지도교수 강석주
- 발행년도 2025
- 학위수여년월 2025. 8
- 학위명 석사
- 학과 및 전공 일반대학원 전자공학과
- 실제 URI http://www.dcollection.net/handler/sogang/000000081968
- UCI I804:11029-000000081968
- 본문언어 한국어
- 저작권 서강대학교 논문은 저작권 보호를 받습니다.
목차
I Introduction 1
II Related Work 6
2.1 Deep Learning for Scanning Electron Microscope 6
2.2 Structure Regression with Optical Critical Dimension 7
III Methodology 8
3.1 Preliminary: Latent Diffusion Model 8
3.2 Data Collection 10
3.2.1 SEM Image 10
3.2.2 OCD Spectrum 12
3.3 Depth Estimation Phase 13
3.3.1 Image Encoder for SEM Image 13
3.3.2 Spectrum Encoder for OCD Spectrum 14
3.3.3 Depth Estimation Diffusion Model 15
3.3.4 Depth Estimation Decoder 15
3.3.5 Loss Function 16
3.4 3D Reconstruction Phase 17
3.4.1 Pointcloud Sementic Coloring Model 17
IV Experiments 18
4.1 Datasets 18
4.2 Implementation Details 18
4.3 Metrics 19
4.4 Result 20
4.4.1 Depth Estimation Phase 20
4.4.2 Pointcloud Segmentation 32
4.5 Ablation Study 35
4.5.1 Robustness Across Various Scenarios 35
4.5.2 Spectrum Encoder 36
4.5.3 Classifier Free Guidance 37
V Conclusion 38
