서강대학교

목차

Chapter 1: Introduction 13
1.1 Research Background 13
1.2 Theoretical Background 14
1.2.1 Ferroelectricity of fluorite-structure material 15
1.2.2 Polymorphic nature of hafnium zirconium oxide 18
1.2.3. Domain and domain wall in orthorhombic HZO 21
1.2.4. Transmission Electron Microscopy 22
Chapter 2: Methods 25
2.1 Sample Preparation 25
2.1.1 Plan-view device preparation 25
2.1.2 Cross-section view device preparation 30
2.2 TEM Analysis 35
2.2.1 DF-TEM Imaging 35
2.2.2 In-situ TEM 35
Chapter 3: Results and Discussion 37
3.1 Structural Properties of the HZO 37
3.2. Phase distinction in polycrystalline HZO 43
3.3 DF image analysis of HZO 49
3.3.1 Diffraction intensity in Non-centrosymmetric 49
3.3.2 DF image of HZO 51
3.4 J-E characteristics of HZO capacitor on TEM grid 53
Chapter 4: Conclusion 59
References 61