Enhancement of Thermal Characteristics and On-Current in GAA MOSFET by Utilizing Al2O3-Based Dual-? Spacer Structure
- 주제(키워드) 도움말 Device reliability , dual-k spacer (DS) , gate-all-around (GAA) MOSFET , self-heating effect (SHE) , thermal characteristics
- 발행기관 IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- 발행년도 2022
- 총서유형 Journal
- 본문언어 영어
