서강대학교

초록/요약

This paper proposed a fast response and mechanically control nanoplasmonic using the Dielectric Elastomer actuator(DEA). To active control the nanoplasmonic, we use the Au nanopattern as the nanoplasmonic and change the interparticle spacing using the DEA to blue-shift or red-shift because of the Localized Surface plasmon resonance (LSPR) phenomenon. For fabricating uniformly arranged Au nanopattern, we use the anodic aluminum oxide (AAO) nanoporous membrane for shadow masking. We use the oxygen plasma machine (CUTE-MP, Femto science, Korea) for hydrophilic treatment of the silicon wafer and AAO nanoporous membrane. Finally, uniform Au nanopattern was successfully realized by the DC magnetron sputtering (KVS-2003, Korea Vacuum Tech, Korea). Because of the LSPR principle, we should fabricate the Au nanopattern onto the interface between the metal and dielectric surface such as the Polydimethylsiloxane (PDMS). Bring the Au nanopattern into conformal contact with the functionalized PDMS. Finally, mount the Au nanopattern/PDMS onto the prepared DEA by plasma bonding. And we found that as the voltage increasing up, the color would be red-shift. After the powering up, as the voltage increases, because the interparticle spacing increases, the plasmonic color is red-shift. When achieve the max strain in my DEA, the plasmonic color become the orange color.