서강대학교

초록/요약

This thesis reports development of atomic force microscope (AFM) probe with a hydrogel- poly (ethylene glycol) diarcrylate (PEG-DA)-. Because typical AFM probes are made of silicon compositions and these have limitations in fabrication method, geometrical and mechanical properties. As introducing hydrogel for fabricating AFM probes, the probe can have geometrical, mechanical tunability, and facile fabricating method. Sequentially, hydrogel tipless cantilever is fabricated and hydrogel tip was integrated. These steps are proceeded in replica molding technique, therefore simple and reproducible fabrication can be secured. Because tip mold is made of elastomeric material-polydimethylsiloxane-, it is compressed for making sharp (sub-30 nm) and high aspect ratio (over 3.0) tips. With fabricated hydrogel nano-probes, AFM topographical imaging can be possible in both air and liquids. Durability of hydrogel nano-probes is analyzed in the sense of wear and tip deformation. With topographical imaging performance, durable characteristics show that the hydrogel nano-probe can be applied for AFM. Also, the hydrogel nano-probes have out-performance than silicon cantilevers at high-speed and deep trench imaging.