Design of a Decentralized Controller for a Glass-RTP System
- 발행기관 서강대학교 일반대학원
- 지도교수 이광순
- 발행년도 2015
- 학위수여년월 2015. 8
- 학위명 석사
- 학과 및 전공 일반대학원 화공생명공학과
- 실제URI http://www.dcollection.net/handler/sogang/000000056100
- 본문언어 영어
- 저작권 서강대학교 논문은 저작권보호를 받습니다.
초록/요약
Design of a decentralized controller has been studied as an integral part of the development of a commercial rapid thermal processing (RTP) system for display glass manufacturing. The glass-RTP system uses bulb-type tungsten-halogen lamps for heating. Highly uniform temperature distribution of less than 6oC of maximum temperature gap is required during glass processing irrespective of the size of glass. To design a decentralized controller to attain this requirement, problems of optimal senor location, lamp grouping, optimization-based controller tuning, and time-varying feedforward input were addressed and solved. The performance of the controller was investigated experimentally as well as numerically.
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