와이어 본딩용 트랜스듀서와 압전 액츄에이터의 진동 특성 연구 : Vibration Characteristics Research of a Wire-Bonding Transducer and a Piezoelectric Actuator
- 발행기관 서강대학교 대학원
- 지도교수 이승엽
- 발행년도 2008
- 학위수여년월 2008. 2
- 학위명 석사
- 학과 및 전공 기계공학
- 식별자(기타) 000000107532
- 본문언어 한국어
목차
The wire-bonding transducer researched in this paper is used at the cooperation company, but it has many problems such as high badness ratio. Therefore, this model is unsuitable for an ultra-precision actuator.
In this research, the vibration characteristics of a transducer system, a piezoelectric actuator, a conical horn and a capillary for the wire bonding are analyzed by using theory including mathematical equation, FEM simulations with Ansys and experiment. Moreover, it is expected to verify problems of this model with these processes. A piezoelectric actuator has the principal longitudinal mode at 254kHz, and an actuator module has the principal longitudinal mode at 145kHz as the result of analysis. A transducer system generates longitudinal mode at 118kHz and coupled mode at 136kHz as well. Wire-bonding transducer is operated at 136kHz at the cooperation company. Because coupled mode is generated at 136kHz as the result of analysis, it is desirable to change the operation frequency of transducer as 118kHz. When problems and design enhancement of this model are discussed, the design enhancement to change from coupled mode to longitudinal mode at 136kHz is required by the location and shape change of mounting flange. Besides, it isn’t efficient to have the difference between the resonance frequency of transducer and actuator module. Therefore, the design enhancement is required to change the resonance frequency of actuator module to 136kHz or to change the resonance frequency of transducer system to 145kHz by the change of horn shape.
